Product Introduction

Product introduction

Line heater CLH series
Chemical bath CB series
Line heater chemical bath applied products
Hot water tank
Quartz tube cleaning equipment
Line heater CLH series
  • The line heater CLH series is an in-line type heater developed for the high-temperature circulation system of chemicals.
  • The stirring spiral in the quartz tube ensures excellent temperature rise time characteristics.
  • The wetted part uses high-purity quartz and PTFE.
  • Power supply standard is AC200V.AC240V.
  • The exterior uses a flame-retardant polypropylene (FRPP).
  • A water leak detection zone is built in the case.
  • The heater surface temperature monitor is built-in. (K type thermocouple)
  • Product lineup example
    (CLH-2022 2.2kW.)(CLH-2030 3.0kW.)
    (CLH-2044 4.4kW.)(CLH-2060 6.0kW.)
Chemical bath CB series
  • Temperature rising bath for heating chemicals.
  • It supports the circulation tank and dip tank.
  • The wetted parts use high-purity quartz and PTFE.
  • A rubber heater on the outside of the quartz ensures excellent temperature rise time characteristics.
  • The power supply standard is AC200V.AC240V.
  • The heater capacity is more than 3kW.
  • The exterior uses a flame-retardant polypropylene (FRPP).
  • A water leak detection zone is built in the case.
  • The heater surface temperature monitor is built-in. (J or K type thermocouple)
Line heater chemical bath applied products
  • This is a revolutionary system that processes the characteristics of phosphoric acid.
  • A stable etching rate, uniformity, and a large improvement in selectivity can be achieved.
Hot water tank
  • The hot water tank is a storage type temperature rising tank developed for heating pure water.
  • The rubber heaters attached to the side and bottom of the high-purity quartz tank ensure excellent temperature rise time characteristics.
  • The wetted part uses high-purity quartz and PTFE.
  • The power supply standard is AC200V.AC240V.
  • A water leak detection zone is built in the case.
  • The exterior uses a flame-retardant polypropylene (FRPP).
  • Heater　(HWT-2060,30L,6kW)(HWT-2070,50L,7kW)(HWT-2070,60L,7kW)
  • The heater surface temperature monitor is built-in. (K type thermocouple)