Aqua static cleaning/drying equipment<Co-patented product with Canon>
  • It efficiently cleans and dries the inside (10nm-) of the extremely small holes such as trenches, via holes, and contact holes, etc., which was difficult with conventional cleaning and drying technology.
  • By performing IPA treatment and DIW rinsing in a closed chamber under reduced pressure, the inside of the micropores after chemical treatment is replaced and rinsed.