Aqua static cleaning/drying equipment<Co-patented product with Canon>
  • It efficiently cleans and dries the inside (10nm-) of the extremely small holes such as trenches, via holes, and contact holes, etc., which was difficult with conventional cleaning and drying technology.
  • It performs IPA treatment/DIW treatment under reduced pressure in the sealed chamber for chemical liquid (liquid component) inside the micro-hole after chemical liquid treatment and reliably replaces rinse with pressure under pressure.
  • After rinsing with DIW, nitrogen is supplied to create a vacuum break, making it possible to reliably dry the inside of the tiny holes. This is developed by the unique technology of our company.