Product Introduction

Product introduction

• Quartz product line

• Line heater CLH series
• Chemical bath CB series
• Line heater chemical bath
  applied products
• Hot water tank

• Drying equipment

• Spin dryer
• Auto balance spin dryer

• Aqua static drying equipment

• Aqua static cleaning/drying equipment

• Single-wafer automatic processing equipment

• Scrubbing equipment

• Batch type WET processing equipment

• Nitride etching equipment
• Fully automatic wet etching equipment
• Fully automatic organic solvent etching equipment
• Quartz tube cleaning equipment

• Example of development product line

• Aqua static cleaning/drying equipment